MEMS milliactuator for hard-disk-drive tracking servo
- 1 June 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 7 (2) , 149-155
- https://doi.org/10.1109/84.679336
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Angular micropositioner for disk drivesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Closed Loop Control And Performance Of A Microactuator For Dual Stage ServoPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1998
- Invar electrodeposition for MEMS applicationPublished by SPIE-Intl Soc Optical Eng ,1996
- Released Si microstructures fabricated by deep etching and shallow diffusionJournal of Microelectromechanical Systems, 1996
- Spin-valve RAM cellIEEE Transactions on Magnetics, 1995
- A Comparison of DC and Pulsed Fe‐Ni Alloy DepositsJournal of the Electrochemical Society, 1993
- Design, fabrication, and operation of submicron gap comb-drive microactuatorsJournal of Microelectromechanical Systems, 1992
- Pulsed Electrodeposition of Iron‐Nickel AlloysJournal of the Electrochemical Society, 1990