Angular micropositioner for disk drives

Publisher Website

22 November 2002

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 454-459
https://doi.org/10.1109/memsys.1997.581890

Abstract

No abstract available

Keywords

This publication has 7 references indexed in Scilit:

Transverse mode electrostatic microactuator for MEMS-based HDD slider
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
Future trends in hard disk drives
IEEE Transactions on Magnetics, 1996
Microactuator control for disk drive
IEEE Transactions on Magnetics, 1996
Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator
IEEE Transactions on Magnetics, 1996
Magnetic recording-head positioning at very high track densities using a microactuator-based, two-stage servo system
IEEE Transactions on Industrial Electronics, 1995
Spin-valve RAM cell
IEEE Transactions on Magnetics, 1995
SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures
Sensors and Actuators A: Physical, 1994