A Semiempirical Calculation of Ion-Induced Kinetic Electron Emission Statistics

Abstract
Electron emission statistics (ES) of ion-induced electron emission from gold at keV energy are investigated using a Monte Carlo simulation of the transport of the projectile ion and recoiling target atoms and a semiempirical model of the kinetic emission. Apparent deviations of experimental ES from Poisson distributions can be explained to result from backscattering of ions and/or recoiling of target atoms.