Ion bombardment of X-ray multilayer coatings: Comparison of ion etching and ion assisted deposition
- 1 April 1991
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 47 (3) , 251-260
- https://doi.org/10.1016/0169-4332(91)90039-m
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- On the use of H+ and Ar+ ions for high spatial resolution depth profilingVacuum, 1990
- Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion PolishingPublished by SPIE-Intl Soc Optical Eng ,1989
- Smoothing of multilayer x-ray mirrors by ion polishingApplied Physics Letters, 1989
- Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer CoatingPublished by SPIE-Intl Soc Optical Eng ,1985
- Low Energy X-Ray Interactions: Photoionization, Scattering, Specular and Bragg ReflectionAIP Conference Proceedings, 1981