Emission from Pulsating Combustion of Silane at a Reduced Pressure
- 1 October 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (10A) , L1966
- https://doi.org/10.1143/jjap.27.l1966
Abstract
A pulsating combustion was found to continue successively, after a mixture of flowing SiH4/He and O2 was ignitied by appropriate means in a Pyrex vessel at a total pressure of ca. 400 Pa. Light emission in the UV and visible region was spectroscopically resolved to be composed of band emissions of SiO(\TildeA-\TildeX) and OH(\TildeA-\TildeX), as well as a broad emission in the visible region. These findings were discussed from the mechanistic viewpoints of silane combustion and chemical vapor deposition of SiO2 films.Keywords
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