Advanced IX projection photolithography
- 1 July 1982
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 11 (4) , 813-830
- https://doi.org/10.1007/bf02672397
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Performance limits in 1:1 UV projection lithographyJournal of Vacuum Science and Technology, 1979
- High-resolution lithography with projection printingIEEE Transactions on Electron Devices, 1979
- Characterization of positive photoresistIEEE Transactions on Electron Devices, 1975