The emission of atomic and molecular ions under single and multiple-charged rare gas ion bombardment of LiF, KCl, SiC
- 1 May 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 98 (1-4) , 462-464
- https://doi.org/10.1016/0168-583x(95)00168-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Electronic effects in low-energy ion sputtering of LiFNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Sputtering of Au, Csl and LiNbO3 by multiply charged Ar ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Sputtering of silicon by multiply charged ionsSurface Science, 1986