Comment on ‘‘High-spatial and high-mass-resolution SIMS instrument for the surface analysis of chemically complex materials’’ [Rev. Sci. Instrum. 6 , 53 (1989)]
- 1 January 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 203-204
- https://doi.org/10.1063/1.1141879
Abstract
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- High-spatial and high-mass-resolution SIMS instrument for the surface analysis of chemically complex materialsReview of Scientific Instruments, 1989