High-spatial and high-mass-resolution SIMS instrument for the surface analysis of chemically complex materials

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Abstract
A secondary ion mass spectrometer (SIMS) has been developed for the surface analysis of chemically complex samples. The instrument has an ion transmission efficiency of 12% and an abundance sensitivity of better than 107 at 500 mass resolution. A computer system has been developed to acquire, store, and process images with up to 1024×1024 pixel resolution. Complex SIMS spectra were resolved using either high-resolution (30 000) mass analysis (HRMS) or mass spectrometry/mass spectrometry (MS/MS). Ion images of insulators or conductors were obtained with approximately 2000 Å resolution. Surface studies of electronic devices and chemical sensors are presented. SIMS–MS/MS analysis was used to identify contaminants on the surface of a failed pressure sensor. The MS/MS analysis of secondary ions minimized interferences and facilitated identification of molecular species.