High signal to noise level ion beam induced charge images
- 11 April 1994
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (15) , 1962-1964
- https://doi.org/10.1063/1.111756
Abstract
The use of MeV α particles to generate ion beam induced charge images with a signal to noise level approximately ten times larger than previously obtained using protons is described. The effect of α particle induced damage on the resultant image contrast is shown and a method of image formation in which the effects of ion induced damage are compensated for is described which enables the use of a higher ion dose.Keywords
This publication has 6 references indexed in Scilit:
- A theory of ion beam induced charge collectionJournal of Applied Physics, 1993
- Dislocation imaging using ion beam induced chargeApplied Physics Letters, 1993
- Ion-beam-induced charge-collection imaging of CMOS ICsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- The effect of ion induced damage on IBIC imagesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Applications of energy loss contrast STIMNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Microcircuit imaging using an ion-beam-induced chargeJournal of Applied Physics, 1992