Reproducible arc-PVD process management under various reactive gases
- 1 May 1992
- Vol. 43 (5) , 567-571
- https://doi.org/10.1016/0042-207x(92)90079-c
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
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- Erosion and ionization in the cathode spot regions of vacuum arcsJournal of Applied Physics, 1973
- Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum AmbientJournal of Applied Physics, 1969