DIFFUSION-INDUCED DEFECTS IN THIN SILICON FILMS
- 1 December 1965
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 7 (11) , 306-308
- https://doi.org/10.1063/1.1754272
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Diffusion-Induced Imperfections in SiliconJournal of the Electrochemical Society, 1965
- Diffusion-Induced Dislocations in SiliconJournal of Applied Physics, 1964
- Formation and Composition of Surface Layers and Solubility Limits of Phosphorus During Diffusion in SiliconJournal of the Electrochemical Society, 1964
- Silicon Phosphide Precipitates in Diffused SiliconJournal of the Electrochemical Society, 1964
- Solid Solubilities of Impurity Elements in Germanium and Silicon*Bell System Technical Journal, 1960
- Electron diffraction from crystals containing stacking faults: IIPhilosophical Magazine, 1957