Deposition of carbon films by the dissociation of methane in r.f. discharge
- 31 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3) , 69-83
- https://doi.org/10.1016/0257-8972(91)90269-3
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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