Grain Structure and Magnetic Anisotropy of Fe Film Evaporated Obliquely from Two Sources
- 1 July 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (7)
- https://doi.org/10.1143/jjap.20.1249
Abstract
A columnar grain structure different from the conventional one has been found experimentally in Fe film evaporated at oblique incidence from two vapor sources positioned opposite one another. The direction of the columnar grain in the film is perpendicular to the substrate, and the column aggregates to form a row perpendicular to the plane of incidence. This formation has been discussed satisfactorily by simulation of the crystallite growth, and the grain structure has been confirmed by three-dimensional analysis of the magnetic anisotropy. Furthermore it is emphasized here that this structure brings out a larger magnetic anisotropy in the film plane than that of conventional film evaporated at oblique incidence.Keywords
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