Titanium in-diffused LiNbO_3 optical waveguide fabrication
- 15 June 1979
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 18 (12) , 2041-2044
- https://doi.org/10.1364/ao.18.002041
Abstract
Techniques used to fabricate titanium in-diffused optical waveguide devices in LiNbO3 are described. The processes described include photolithography, precision mask orientation and registration, metal diffusion, waveguide end polishing, and crystal cleaving.Keywords
This publication has 5 references indexed in Scilit:
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