Microstructural Analysis of CoCr Thin Films by Small-Angle Neutron Scattering
- 1 June 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (6R)
- https://doi.org/10.1143/jjap.32.2665
Abstract
Small-angle neutron scattering is applied to the analysis of latent microstructures in compositionally separated CoCr thin films. A fine in-grain structure less than 10 nm in size is observed in a film deposited at 200°C using small-angle scattering. This structure coincides with that observed by means of transmission electron microscopy (TEM) in chemically etched thin films. The fine in-grain structure disappears when the deposition temperature is increased to 400°C. This experiment confirms the existence of latent microstructures in CoCr films and reveals that further analysis of magnetic microstructures is possible using neutron scattering.Keywords
This publication has 6 references indexed in Scilit:
- Direct evidence for compositional fluctuation in sputtered Co-Cr thin filmsJournal of Magnetism and Magnetic Materials, 1992
- Compositional Separation in Co-Cr Based Alloy Films.Journal of the Magnetics Society of Japan, 1992
- NMR Study of Compositional Inhomogeneities in Sputtered Co-Cr FilmsJapanese Journal of Applied Physics, 1991
- Selective Chemical Etching of Latent Compositional Microstructures in Sputtered Co-Cr FilmsJapanese Journal of Applied Physics, 1990
- TEM Observation of Microstructure in Sputtered Co-Cr FilmJapanese Journal of Applied Physics, 1985
- Perpendicular magnetic recordingIEEE Transactions on Magnetics, 1980