The removal of surface silica and its effect upon silicon nitridation kinetics
- 1 August 1981
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 16 (8) , 2319-2321
- https://doi.org/10.1007/bf00542400
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Reaction-bonded silicon nitride: its formation and propertiesJournal of Materials Science, 1979
- The effects of hydrogen on the nitridation of siliconJournal of Materials Science, 1979
- Effects of Fe and FeSi2 on the Nitriding of Si PowderJournal of the American Ceramic Society, 1978
- Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1976