Plasma diagnostics in negative ion sources
- 1 August 1993
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 2 (3) , 190-197
- https://doi.org/10.1088/0963-0252/2/3/009
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Negative ions in a radio-frequency plasma in CF4Journal of Physics D: Applied Physics, 1991
- Negative hydrogen ion densities and drift velocities in a multicusp ion sourceJournal of Applied Physics, 1990
- Photodetachment effect in a radio frequency plasma in CF4Applied Physics Letters, 1989
- Photodetachment technique for measuring H− velocities in a hydrogen plasmaReview of Scientific Instruments, 1989
- Negative Ion Kinetics in RF Glow DischargesIEEE Transactions on Plasma Science, 1986
- Negative ion densities in NF3 dischargesApplied Physics Letters, 1984
- Electron collection radius of an electrostatic probe immersed in a low-pressure plasmaJournal de Physique Lettres, 1981
- Measurement of H− density in plasma by photodetachmentReview of Scientific Instruments, 1979
- Production of a quasi electron free plasma using electronic attachmentPhysics Letters A, 1970
- Electrostatic probe theory for free molecular cylinders.AIAA Journal, 1968