Branched Ta nanocolumns grown by glancing angle deposition
- 15 May 2006
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 88 (20)
- https://doi.org/10.1063/1.2204759
Abstract
No abstract availableKeywords
This publication has 30 references indexed in Scilit:
- Two-component nanopillar arrays grown by Glancing Angle DepositionThin Solid Films, 2006
- Uniform Si nanostructures grown by oblique angle deposition with substrate swing rotationNanotechnology, 2005
- Controlled growth of periodic pillars by glancing angle depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- FABRICATION OF Si NANOCOLUMNS AND Si SQUARE SPIRALS ON SELF-ASSEMBLED MONOLAYER COLLOID SUBSTRATESInternational Journal of Nanoscience, 2002
- Fabrication of Tetragonal Square Spiral Photonic CrystalsNano Letters, 2001
- Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film depositionJournal of Vacuum Science & Technology A, 2001
- Origin and evolution of sculptured thin filmsJournal of Vacuum Science & Technology A, 2000
- Fabrication of submicrometer regular arrays of pillars and helicesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Thin films with nanometer-scale pillar microstructureJournal of Materials Research, 1999
- Sculptured thin films and glancing angle deposition: Growth mechanics and applicationsJournal of Vacuum Science & Technology A, 1997