Where Are My On-Wafer Reference Planes?
- 1 December 1987
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 12, 27-40
- https://doi.org/10.1109/arftg.1987.323881
Abstract
In order to characterize the accuracy of on-wafer measurements, there is the need to understand microwave waver probe calibrations over a matrix of planar transmission line types, sizes, and substrate materials. One of the calibration issues which arise is the electrical lengths of the planar calibration standards relative to each other and relative to the device under test. In this paper, three techniques for verifition of planar calibration standards are presented and shown to agree within ±0.1 ps of electrical length.Keywords
This publication has 1 reference indexed in Scilit:
- Planar Impedance Standards and Accuracy Considerations in Vector Network AnalysisPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1986