Performance modelling of micromachined sensor membranes coated with piezomagnetic material
- 1 November 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 51 (2-3) , 219-224
- https://doi.org/10.1016/0924-4247(95)01215-x
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- A small-size silicon microphone for measurements in turbulent gas flowsSensors and Actuators A: Physical, 1994
- Capacitive microphone with a surface micromachined backplate using electroplating technologyJournal of Microelectromechanical Systems, 1994
- Magnetic and magnetoelastic properties of amorphous Fe-Si-B-C filmsIEEE Transactions on Magnetics, 1994
- Anisotropy and magnetostriction in metallic glassesJournal of Magnetism and Magnetic Materials, 1992
- Amorphous Fe-B-Si magnetic films by reactive sputtering from a pure iron sourceJournal of Applied Physics, 1988
- Planar inductors on magnetic substratesIEEE Transactions on Magnetics, 1988
- Sensitive, wide frequency range magnetostrictive strain gageSensors and Actuators, 1987
- Stress-magnetic effects in iron-rich amorphous alloys and shock-stress sensors with no powerIEEE Transactions on Magnetics, 1981