Capacitive microphone with a surface micromachined backplate using electroplating technology
- 1 June 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 3 (2) , 69-75
- https://doi.org/10.1109/84.294323
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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