Applicability of silver implanted amorphous GeSe2 as inorganic negative resist
- 16 June 1989
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 113 (2) , K171-K175
- https://doi.org/10.1002/pssa.2211130256
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Ion-beam induced silver doping in the Ag2Se/GeSe2-resist systemPhysica Status Solidi (a), 1988
- A new interpretation of the photodoping effect in amorphous As- and Ge-chalcogenidesPhysica Status Solidi (a), 1987
- Influence of recoil transport on energy-loss and damage profilesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986