Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers
- 1 August 1996
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 80 (3) , 1388-1398
- https://doi.org/10.1063/1.362938
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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