Weibull slope and voltage acceleration of ultra-thin (1.1–1.45 nm EOT) oxynitrides
- 30 April 2004
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 72 (1-4) , 61-65
- https://doi.org/10.1016/j.mee.2003.12.017
Abstract
No abstract availableKeywords
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