Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 4. Production and Loss Processes of Negative Ions.
- 1 January 1999
- journal article
- Published by Japan Society of Plasma Science and Nuclear Fusion Research in Journal of Plasma and Fusion Research
- Vol. 75 (7) , 792-799
- https://doi.org/10.1585/jspf.75.792
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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