Stable photoinduced paramagnetic defects in hydrogenated amorphous silicon nitride
- 24 August 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (8) , 608-610
- https://doi.org/10.1063/1.98362
Abstract
Room-temperature stable paramagnetic defects have been induced in hydrogenated amorphous silicon nitride films by exposure to sub-band-gap ultraviolet light. These defects are almost certainly trivalent silicon centers which can be completely annealed at temperatures higher than 250 °C. These defects seem similar in chemical origin to light-induced centers in hydrogenated amorphous silicon and defects in irradiated metal-oxide-semiconductor field-effect transistors.Keywords
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