The effects of substrate and bias on CoNiCr/Cr thin films
- 1 September 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 28 (5) , 3096-3098
- https://doi.org/10.1109/20.179724
Abstract
The magnetic properties and microstructural characteristics of CoNiCr/Cr films with thin Cr underlayers prepared on both single-crystal Si and glass substrates are discussed. It is found that {200} crystallographic texture is easily obtained for Cr films prepared on Si at room temperature. Substrate bias during the Cr deposition, however, changes the Cr {200} texture to {110}. Substrate bias during the CoNiCr deposition degrades the texture of the Cr underlayerKeywords
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