Three-axis sample manipulator with X Y Z translation for use in UHV
- 1 March 1986
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (3) , 487-489
- https://doi.org/10.1063/1.1138913
Abstract
A three‐axis manipulator suitable for atom diffraction experiments has been constructed by combining three modules with translation, polar rotation, and azimuthal‐tilt rotation capabilities. No magnetic materials are used and materials have been chosen to minimize the possibility of galling in vacuum. Azimuthal rotations of up to ±110°, tilt rotations of up to ±30°, and polar rotations of ±180° are possible with the manipulator. The Z motion is ±2 in. and XY motions of 10 mm lead to a change in azimuthal and tilt angles of less than one degree. The sample is heated with electron bombardment and can be cooled to 80 K.Keywords
This publication has 3 references indexed in Scilit:
- UHV application of spring-loaded Teflon sealsReview of Scientific Instruments, 1978
- A bakable UHV, Precision three-axis goniometerNuclear Instruments and Methods, 1978
- A novel ultra-high vacuum manipulator with six degrees of freedomNuclear Instruments and Methods, 1977