Nitrogen Ion Implantation into α-SiC Epitaxial Layers
- 1 July 1997
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 162 (1) , 263-276
- https://doi.org/10.1002/1521-396x(199707)162:1<263::aid-pssa263>3.0.co;2-w
Abstract
No abstract availableKeywords
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