Chemical vapor deposition and characterization of undoped and nitrogen-doped single crystalline 6H-SiC
- 1 December 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (11) , 5437-5442
- https://doi.org/10.1063/1.351985
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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