Cylindrical Mirror Analyzer (CMA) with an Axially Integrated ISS-AES Gun for Surface Composition Analysis

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Abstract
We have devised CMA with an axially integrated ion-electron gun for low-energy ion scattering spectroscopy (ISS) and Auger electron spectroscopy (AES). This allows an alternate analysis of ISS and AES within 30 sec, being applicable to surface segregation phenomena. The CMA accepts a large segment of the particles scattered through an angle of 146° at normal incidence. The detection sensitivity and the mass resolution in the ISS mode are shown using Ne+ ion beams with an energy of 1 keV. The Ne+ ion dose required to scan a scattering peak can be reduced to an order of 1011 ions/cm2. A practical application is presented for the coevaporated Cu-Mu alloy films prepared in an ultrahigh vacuum.