’’NODUS’’—a sensitive new instrument for analyzing the composition of surfaces
- 1 June 1978
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 49 (6) , 707-714
- https://doi.org/10.1063/1.1135598
Abstract
A novel type of ion‐scattering spectrometer for analyzing the composition of surfaces is described. By means of a specially designed cylindrical mirroranalyzer the sensitivity of the instrument is increased by two or three orders of magnitude as compared with that of equipment used hitherto. The increased sensitivity allows analyses to be performed using extremely low ion doses. Under these conditions, destruction of the surface is negligible. The use of a differential pumping system guarantees UHV conditions at the target, thus minimizing contamination.Keywords
This publication has 14 references indexed in Scilit:
- Angular-dependent Ne+-ion scattering from a solid Au targetJournal of Vacuum Science and Technology, 1976
- SORBAS: An apparatus for investigating ion scattering from surfaces at energies 100-2000 eVJournal of Physics E: Scientific Instruments, 1975
- Analysis of the outermost atomic layer of a surface by low-energy ion scatteringSurface Science, 1973
- Ion scattering: a spectroscopic tool for study of the outermost atomic layer of a solid surfaceChemical Physics Letters, 1972
- Analysis of back scattered ions as a technique for the study of surfacesJournal of Physics E: Scientific Instruments, 1972
- Analysis of surface composition with low-energy backscattered ionsSurface Science, 1971
- Mass-separated ion sourceNuclear Instruments and Methods, 1971
- HIGH SENSITIVITY AUGER ELECTRON SPECTROMETERApplied Physics Letters, 1969
- The colutron, a zero deflection isotope separatorNuclear Instruments and Methods, 1964
- Surface analysis by charged particle spectroscopyNuclear Instruments and Methods, 1959