Investigation of diamondlike carbon thin films synthesized by dual ion beam assisted deposition
- 1 September 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 82 (4) , 528-532
- https://doi.org/10.1016/0168-583x(93)96006-x
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
- Characterization of low pressure deposited diamond films by X-ray photoelectron spectroscopyThin Solid Films, 1990
- Optical absorption and hydrogen content of plasma- deposited carbon filmsThin Solid Films, 1988
- Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recordingJournal of Vacuum Science & Technology A, 1987
- Properties of amorphous carbon films deposited by ion beam methodsThin Solid Films, 1987
- Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge II: Effect of hydrogenThin Solid Films, 1987
- Structure and physical properties of plasma-grown amorphous hydrogenated carbon filmsThin Solid Films, 1987
- Hard films of unusual microstructureThin Solid Films, 1983
- Electron spectroscopy of ion beam and hydrocarbon plasma generated diamondlike carbon filmsJournal of Vacuum Science and Technology, 1981
- Characterization of hard carbon films by electron energy loss spectrometryThin Solid Films, 1979
- X-ray photoemission studies of diamond, graphite, and glassy carbon valence bandsPhysical Review B, 1974