Fluidic microsystems based on printed circuit board technology
- 24 July 2001
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 11 (5) , 528-531
- https://doi.org/10.1088/0960-1317/11/5/313
Abstract
In this paper, fluidic microsystems based on an alternative fabricating technology are described. This technology mainly utilizes the manufacturing principles of printed circuit boards (PCBs). Minimal lateral structure dimensions of approximately 100 µm und vertical dimensions of some 10 µm are feasible. By introducing thin polymeric foils (6-13 µm in thickness) into a stack of PCBs, movable parts forming active or passive valves, pumps or sensors can be produced. The first results concerning several fluidic components based on PCB technology are presented.Keywords
This publication has 6 references indexed in Scilit:
- Miniature valveless pumps based on printed circuit board techniqueSensors and Actuators A: Physical, 2001
- A microfluidic pH-regulation system based on printed circuit board technologySensors and Actuators A: Physical, 2000
- High-performance micropumps based on printed circuit board technologyPublished by SPIE-Intl Soc Optical Eng ,2000
- Electric fields in fluidic channels and sensor applications with capacitanceSensors and Actuators A: Physical, 2000
- A new technology for fluidic microsystems based on PCB technologySensors and Actuators A: Physical, 1999
- Reflexions on the future of microsystemsSensors and Actuators A: Physical, 1999