Ultrahigh vacuum systems using low temperature pumps
- 1 December 1973
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (12) , 1743-1746
- https://doi.org/10.1063/1.1686046
Abstract
Low temperature pumping is utilized to achieve pressures as low as 10−11 Torr. In the first method, the entire sample chamber is immersed inside liquid helium. The second method, which is more economical than the first one, combines a large capacity titanium sublimation pump and a small cold trap immersed inside a liquid‐helium storage Dewar. The ultrahigh vacuum system described here is economically competitive with the best ion‐pumped vacuum system available today.Keywords
This publication has 3 references indexed in Scilit:
- Tunneling into a High -Superconductor-SnPhysical Review Letters, 1972
- The Design and Performance of a High-Speed Economical Ultrahigh Vacuum Chamber Utilizing Titanium SublimationReview of Scientific Instruments, 1972
- The Use of Commercial Crush Ring Flanges for Vacuum Seals in Superfluid HeliumReview of Scientific Instruments, 1970