MOS technology for VLSI

This publication has 31 references indexed in Scilit:

• MOS Device and technology constraints in VLSI
  IEEE Transactions on Electron Devices, 1982
• A bird's beak free local oxidation technology feasible for VLSI circuits fabrication
  IEEE Transactions on Electron Devices, 1982
• Sealed-interface local oxidation technology
  IEEE Transactions on Electron Devices, 1982
• Surface conduction in short-channel MOS devices as a limitation to VLSI scaling
  IEEE Transactions on Electron Devices, 1982
• The impact of scaling laws on the choice of n-channel or p-channel for MOS VLSI
  IEEE Electron Device Letters, 1980
• Short-channel MOSFETs in the punchthrough current mode
  IEEE Journal of Solid-State Circuits, 1979
• Computer analysis of punch-through in MOSFETs
  Solid-State Electronics, 1979
• Design of ion-implanted MOSFET's with very small physical dimensions
  IEEE Journal of Solid-State Circuits, 1974
• An analysis of the threshold voltage for short-channel IGFET's
  Solid-State Electronics, 1973
• Current-voltage characteristics of small size MOS transistors
  IEEE Transactions on Electron Devices, 1972