Fabrication of 45° mirrors together with well-defined v-grooves using wet anisotropic etching of silicon
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (4) , 213-219
- https://doi.org/10.1109/84.475548
Abstract
No abstract availableKeywords
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