68.2: 3.5 Inch QCIF+ AM‐OLED Panel Based on Oxide TFT Backplane

Abstract
IGZO TFTs were fabricated on a glass substrate by conventional photo‐lithography and wet‐etching processes. The real mobility of our device was about 95 cm2/Vs and had very low dependence on the variation of W/L, channel length and channel width. An IGZO TFT array was also fabricated and a top emission OLED device was successfully driven by it. Therefore, the oxide TFT could be one of the promising candidates as a backplane for the OLED device.