ARXPS-analysis of sputtered TiC, SiC and Ti0.5Si0.5C layers
- 1 January 1993
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 346 (1-3) , 227-232
- https://doi.org/10.1007/bf00321420
Abstract
No abstract availableKeywords
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