Growth of three-dimensional dielectric waveguides for integrated optics by molecular-beam-epitaxy method
- 15 October 1972
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 21 (8) , 355-356
- https://doi.org/10.1063/1.1654409
Abstract
Experimental work was carried out to fabricate three-dimensional waveguides for integrated optics by masking molecular beams during epitaxy of GaAs and AlxGa1−xAs. We report here some preliminary results of this new technique for fabricating dielectric waveguides.Keywords
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