The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIE
- 1 October 1996
- Vol. 47 (10) , 1215-1217
- https://doi.org/10.1016/0042-207x(96)00129-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Monolithic GaAs MESFET power sensor microsystemElectronics Letters, 1995
- Thermal wattmeter with direct power conversionIEEE Transactions on Instrumentation and Measurement, 1995
- Silicon trench etching in a multi-frequency discharge reactorVacuum, 1994