Silicon micromachined two-dimensional galvano optical scanner
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 30 (6) , 4647-4649
- https://doi.org/10.1109/20.334177
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coilsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface micromachined magnetic actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Electromagetically driven microvalveMicrosystem Technologies, 1995
- Electromagnetic microactuators with multiple degrees of freedomPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991