Electromagnetic microactuators with multiple degrees of freedom
- 1 January 1991
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Laterally driven polysilicon resonant microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Magnetic micro-actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromachined silicon microvalvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfabricated actuator with moving permanent magnetPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- The design and fabrication of a magnetically actuated micromachined flow valveSensors and Actuators A: Physical, 1990