Automated assembly of flip-up micromirrors
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 347-350
- https://doi.org/10.1109/sensor.1997.613655
Abstract
A microelectromechanical system for the automated assembly of flip-up micro-structures has been designed and fabricated. The system consists of a vertical thermal actuator, a linear assembly micromotor, and a self-engaging locking mechanism. The vertical thermal actuator is used to lift one end of the plate off of the substrate. This provides the linear assembly micromotor the leverage needed to push the plate up into a position where the self engaging locking mechanism secures the plate. The automated assembly system is demonstrated with a scanning micromirror and a corner cube reflector.Keywords
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