Target effects during the deposition of Ti-a-C:H films
- 1 December 1989
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 39-40, 285-292
- https://doi.org/10.1016/0257-8972(89)90062-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Quantitative XPS-analysis of tantalum-containing amorphous carbon filmsAnalytical and Bioanalytical Chemistry, 1989
- Tribological and electrical properties of metal-containing hydrogenated carbon filmsApplied Physics Letters, 1987
- Empirical atomic sensitivity factors for quantitative analysis by electron spectroscopy for chemical analysisSurface and Interface Analysis, 1981
- Frictional properties of diamondlike carbon layersApplied Physics Letters, 1980