Thermal simulation of micromachined bridges for integrated pyroelectric sensor arrays
- 31 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4) , 75-78
- https://doi.org/10.1016/0167-9317(95)00118-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Pyroelectric infrared-CCD image sensor using LiTaO3Sensors and Actuators, 1989
- A simple technique to interface pyroelectric materials with silicon substrates for infrared detectionFerroelectrics Letters Section, 1989
- Pyroelectric devices and materialsReports on Progress in Physics, 1986