A simple technique to interface pyroelectric materials with silicon substrates for infrared detection
- 1 January 1989
- journal article
- research article
- Published by Taylor & Francis in Ferroelectrics Letters Section
- Vol. 9 (6) , 155-160
- https://doi.org/10.1080/07315178908200767
Abstract
A simple technique is presented to interface pyroelectric materials with Si-substrates, into which sensor array circuitry is integrated. The pyroelectric material is inter-faced with the substrate via a thin dielectric layer. The feasibility of the technique is demonstrated by the realization of a single element infrared sensor.Keywords
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