Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps
- 1 February 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 79 (2) , 115-121
- https://doi.org/10.1016/s0924-4247(99)00279-4
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulationSensors and Actuators A: Physical, 1999
- Asymmetrical locations of heaters and sensors relative to each other using heater arrays: a novel method for designing multi-range electrocaloric mass-flow sensorsSensors and Actuators A: Physical, 1997
- Micromachined flow sensors—a reviewFlow Measurement and Instrumentation, 1997
- Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquidsJournal of Microelectromechanical Systems, 1997
- Microflow devices and systemsJournal of Micromechanics and Microengineering, 1994
- Towards integrated microliquid handling systemsJournal of Micromechanics and Microengineering, 1994
- Integrated flow-regulated silicon micropumpSensors and Actuators A: Physical, 1994
- Acoustically driven flow in flexural plate wave devices: theory and experimentPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1994
- Microfluidics-a reviewJournal of Micromechanics and Microengineering, 1993
- Microtransport induced by ultrasonic Lamb wavesApplied Physics Letters, 1991