Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests
- 1 January 1994
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 9 (1) , 96-103
- https://doi.org/10.1557/jmr.1994.0096
Abstract
No abstract availableKeywords
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